This work presents the laterally vibrating Lamb wave resonators (LVRs) based on a 30% aluminum scandium nitride (Al0.7Sc0.3N) thin film with three interdigited transducer pairs operating in the S0 mode. In order to reduce the anchor loss, perfect matched layer-based finite element analysis simulations are utilized to design and optimize the device. Thanks to the high quality AlScN using magnetron sputtering with a single alloy target, vertical etching profile, and designed device structure, 1- μm-thick Al0.7Sc0.3N-based LVRs with high performance are fabricated. The resonator equivalent electric parameters are extracted utilizing the modified Butterworth–Van Dyke model. The best Al0.7Sc0.3N LVR achieves an electromechanical coupling coefficient ( kt2) of 9.7% and a loaded quality factor ( Qr) of 1141.5 operating at approximately 305 MHz. The same resonator shows a motional quality factor ( Qm) of 1507.2, resulting in a high figure-of-merit ( FoM = kt2 · Qm) of 146.2. A 1.8 MHz tuning range is measured for an Al0.7Sc0.3N LVR by applying DC voltage in the range of −40 to 40 V due to the ferroelectric property of high Sc doping in Al0.7Sc0.3N. With the high FoM, Qr, Qm, and low motional resistance ( Rm), the Al0.7Sc0.3N-based LVRs show strong potential in applications of radio frequency communications and piezoelectric transducers.

中文翻译：

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品质因数(kt2·Qm)大于146的Al0.7Sc0.3N蝶形横向振动谐振器

这项工作介绍了基于 30% 氮化铝钪 (Al0.7科学0.3N) 具有在 S 中运行的三个叉指换能器对的薄膜0模式。为了减少锚损失，利用基于完美匹配层的有限元分析模拟来设计和优化装置。得益于采用单一合金靶材磁控溅射、垂直蚀刻剖面和设计的器件结构的高质量 AlScN，1- μm 厚的 Al0.7科学0.3制造了高性能的基于N的LVR。利用修改后的 Butterworth–Van Dyke 模型提取谐振器等效电参数。最好的艾尔0.7科学0.3N LVR 实现机电耦合系数 ( k吨2个) 的 9.7% 和加载的品质因数 ( Qr) 的 1141.5 以大约 305 MHz 的频率运行。相同的谐振器显示运动品质因数（ Q米) 的 1507.2，导致高品质因数 ( FoM = k吨2个·问米) 的 146.2。一个 1.8 MHz 的调谐范围被测量为铝0.7科学0.3由于 Al 中高掺杂 Sc 的铁电特性，通过在 -40 至 40 V 范围内施加直流电压实现 N LVR0.7科学0.3N. 具有高 FoM，Qr, 问米，和低运动阻力（R米), 铝0.7科学0.3基于N的LVR在射频通信和压电换能器的应用中显示出强大的潜力。