Metallic glasses (MGs) are considered as promising materials for microelectromechanical systems (MEMS) due to their excellent mechanical properties combined with unique net shape formability. However, the prevalent fabrication of MG MEMS is based on semiconductor micro-manufacturing technology which is limited to 2D. This work introduces a mechanically guided manufacturing method which enables facile fabrication of free-standing 3D MG structures with predictable complex and high-aspect-ratio configuration. As examples, 3D MG architectures with out-of-plane aspect ratio up to three and MG microhelices arrays are fabricated. Most critically, we show the prepared architectures exhibit super-elasticity. Such unprecedented elasticity originates from the near-ideal elastic limit of MGs, combining with geometric optimization. Finally, we demonstrate that the microstructure of the MG 3D architectures can be tuned over a wide range, which is desirable in a wide range of applications such as sensing and energy harvesting devices.

金属玻璃 (MG) 因其优异的机械性能和独特的净形状成形性而被认为是微机电系统 (MEMS) 的有前途的材料。然而，MG MEMS 的普遍制造是基于仅限于二维的半导体微制造技术。这项工作介绍了一种机械引导的制造方法，该方法能够轻松制造具有可预测的复杂和高纵横比配置的独立式 3D MG 结构。例如，制造了平面外纵横比高达 3 的 3D MG 架构和 MG 微螺旋阵列。最关键的是，我们展示了准备好的架构表现出超弹性。这种前所未有的弹性源于MGs近乎理想的弹性极限，结合几何优化。最后，