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Modeling and Experimental Verification of Surface Roughness for Grinding Monocrystalline Silicon Lens
Advanced Theory and Simulations ( IF 2.9 ) Pub Date : 2022-04-04 , DOI: 10.1002/adts.202100422
Fanxuan Yang 1, 2 , Yuli Sun 1 , Yaji Wang 1 , Honglei Mo 3 , Limin Zhu 3 , Hang Yuan 3 , Bo Lu 3 , Guiguan Zhang 1 , Dunwen Zuo 1
Affiliation  

The purpose of this paper is to study the formation mechanism of aspheric surface roughness and reveal the influence of processing parameters on the surface roughness. Aiming at the normal grinding method of aspheric surface, taking into account the geometric and kinematic characteristics of the grinding process of aspherical components, the surface roughness model of aspherical parts grinding is established and verified based on the theory of grinding technology. The relative error between the calculated value of the developed grinding surface roughness model and the actual measured value is within 20%. The model and experiments show that when the grinding wheel speed is 6000 r min−1, the workpiece speed is 70 r min−1, and the grinding depth is 70 μm, the aspheric surface roughness increases from about Ra0.1 μm at the center of the workpiece to about Ra0.4 μm at the outer edge of the workpiece. Increasing the grinding wheel speed, reducing the grinding depth and the workpiece speed can significantly reduce the surface roughness and make the aspheric surface roughness distribution tend to be uniform. The theoretical model proposed in this paper provides theoretical guidance for the controllable and efficient machining of aspheric components.

中文翻译:

单晶硅透镜磨削表面粗糙度建模与实验验证

本文旨在研究非球面粗糙度的形成机理,揭示加工参数对表面粗糙度的影响。针对非球面的普通磨削方法,考虑到非球面零件磨削过程的几何和运动学特点,基于磨削技术理论建立并验证了非球面零件磨削的表面粗糙度模型。所开发的磨削表面粗糙度模型计算值与实际测量值的相对误差在20%以内。模型和实验表明,当砂轮转速为 6000 r min -1时,工件转速为 70 r min -1,磨削深度为70 μm时,非球面粗糙度由工件中心的Ra0.1 μm左右增加到工件外缘的Ra0.4 μm左右。提高砂轮转速,降低磨削深度和工件转速,可以显着降低表面粗糙度,使非球面粗糙度分布趋于均匀。本文提出的理论模型为非球面零件的可控高效加工提供了理论指导。
更新日期:2022-04-04
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