Nanocomposite coatings have become promising protective materials due to their high hardness and anti-wear properties applicable in high-speed dry cutting and grinding tool industries. The monolithic TiN, TiBN, TiAlSiN and hierarchical TiBN/TiAlSiN coatings were deposited on Si and cemented carbide substrates at various N₂ partial pressures using a cathodic multi-arc ion plating system wherein the alloyed TiB₂ and TiAlSi targets were selected as cathodes. The microstructure, composition and morphology were measured by XRD, XPS, SEM, HRTEM and AFM, respectively. Nanoindentation and ball-on-disc friction testing were performed to investigate the mechanical and tribological properties of the coatings. The results show that TiBN/TiAlSiN coatings compose of numbers of alternating TiBN and TiAlSiN sublayers with a few nanometer periods. As compared to hardness beneath 28 GPa and coefficient of friction over 0.50 for monolithic TiBN and TiAlSiN coatings fabricated at 2.0 Pa, the TiBN/TiAlSiN multilayered coatings possess a microhardness value of 34 GPa with the lowest COF of 0.29, while the maximum value can reach 38 GPa on samples prepared at 1.0 Pa. Their mechanical and tribological properties are superior significantly to the monolithic TiBN or TiAlSiN, which pave the way for fabricating hard/lubricant nanosized multilayered coatings for application on dry-cutting and grinding tools.

纳米复合涂层因其高硬度和抗磨损性能而成为很有前景的防护材料，适用于高速干式切削和磨削工具行业。使用阴极多弧离子镀系统在不同的 N ₂分压下将整体 TiN、TiBN、TiAlSiN 和分级 TiBN/TiAlSiN 涂层沉积在 Si 和硬质合金基材上，其中合金化 TiB ₂和 TiAlSi 靶材被选为阴极。通过XRD、XPS、SEM、HRTEM和AFM分别测量了微观结构、成分和形貌。进行纳米压痕和球盘摩擦测试以研究涂层的机械和摩擦学性能。结果表明，TiBN/TiAlSiN涂层由数个纳米周期交替的TiBN和TiAlSiN亚层组成。与在 2.0 Pa 制备的整体 TiBN 和 TiAlSiN 涂层的硬度低于 28  GPa 和摩擦系数超过 0.50 相比 ，TiBN/TiAlSiN 多层涂层的显微硬度值为 34  GPa，最低 COF 为 0.29，而最大值可以达到 在 1.0 制备的样品上为38 GPa Pa. 它们的机械和摩擦学性能明显优于单片 TiBN 或 TiAlSiN，这为制造用于干切削和磨削工具的硬质/润滑纳米多层涂层铺平了道路。