An inertial switch with bi-directional adjustable threshold function is designed, and the adjustable threshold is achieved by electrostatic force. Based on Micro-Electro-Mechanical System (MEMS) technology, an all-metal structure inertial switch is fabricated, and the core structure is composed of three-layer parallel plates. Besides, an insulating layer of polyimide is utilized on the top and bottom plates so as to avoid electrostatic breakdown. Typically, the proof-mass as a movable structure also serves as an intermediate plate. Electrostatic forces in different directions are generated by applying voltage on the bottom or top parallel plate electrodes. Through theoretical model and finite element simulation, the force state of the proof-mass during the operating inertial micro-switch is surveyed, and the influence of electrostatic force on the threshold acceleration is also analyzed. The experimental results show that the initial acceleration of the inertial micro-switch is 79 g without bias voltage. When a bias voltage with the range of 0–100 V is applied to the bottom plate, the threshold acceleration varies within the range of 79 g-13 g, and the relationship between voltage and threshold acceleration is negatively correlated. Furthermore, when a bias voltage with the range of 65-100 V is applied to the top plate, the threshold acceleration varies within the range of 170 g-240 g, and threshold acceleration is positively correlated. The experiment is well matched with the theoretical analysis. [2021-0184]

中文翻译：

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具有大规模双向可调阈值功能的MEMS惯性开关


设计了一种具有双向可调阈值功能的惯性开关，通过静电力实现阈值可调。基于微机电系统（MEMS）技术，制作了一种全金属结构惯性开关，其核心结构由三层平行板组成。此外，顶板和底板均采用聚酰亚胺绝缘层，以避免静电击穿。通常，作为可移动结构的质量块也用作中间板。通过在底部或顶部平行板电极上施加电压来产生不同方向的静电力。通过理论模型和有限元仿真，考察了惯性微动开关工作过程中质量块的受力状态，并分析了静电力对阈值加速度的影响。实验结果表明，在无偏置电压的情况下，惯性微动开关的初始加速度为79 g。当对底板施加0-100V范围的偏置电压时，阈值加速度在79g-13g范围内变化，并且电压与阈值加速度之间呈负相关关系。此外，当对顶板施加65-100V范围的偏置电压时，阈值加速度在170g-240g的范围内变化，并且阈值加速度呈正相关。实验与理论分析吻合良好。 [2021-0184]