On-chip optical communications are growingly aiming at multimode operation together with mode-division multiplexing to further increase the transmission capacity. Optical switches, which are capable of optical signals switching at the nodes, play a key role in optical networks. We demonstrate a 2 × 2 electro-optic Mach–Zehnder interferometer-based mode- and polarization-selective switch fabricated by standard complementary metal–oxide–semiconductor process. An electro optic tuner based on a PN-doped junction in one of the Mach–Zehnder interferometer arms enables dynamic switching in 11 ns. For all the channels, the overall insertion losses and inter-modal crosstalk values are below 9.03 and –15.86 dB at 1550 nm, respectively.

中文翻译：

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硅集成高速模式和偏振开关和选择器

片上光通信越来越多地致力于多模操作和模分复用，以进一步提高传输容量。能够在节点处进行光信号交换的光开关在光网络中起着关键作用。我们展示了一个 2 × 2 电光 Mach-Zehnder 基于干涉仪的模式和偏振选择开关，该开关由标准互补金属氧化物半导体工艺制造。基于马赫-曾德尔干涉仪臂之一中 PN 掺杂结的电光调谐器可在 11 ns 内实现动态切换。对于所有通道，1550 nm 处的总插入损耗和模间串扰值分别低于 9.03 和 –15.86 dB。