In the present work, ferrite (Fe) doped TiO₂ thin films with different volume percentage (vol%) were synthesized using a spray pyrolysis technique. The effect of Fe doping on structural properties such as crystallite size, texture coefficient, microstrain, dislocation densities etc. were evaluated from the X ray diffratometry (XRD) data. XRD data revealed a polycrystalline anatase TiO₂ phase for sample synthesized up to 2 vol% and mixed anatase and rutile crystalline phase for sample synthesized at 4 vol% Fe doped TiO₂. The crystalline size was observed to decrease with increase in Fe dopant vol% and also other structural parameters changes with Fe dopant percentage. In the present work, electrical resistance was observed to decrease with a rise in Fe dopant vol% and temperature of the sample. Thermal properties like temperature coefficient of resistance and activation energy also showed strong correlation with Fe dopant vol%. Humidity sensing properties of the synthesized sample altered with a change in Fe dopant vol%. In the present paper, maximum sensitivity of about 88.7% for the sample synthesized with 2 vol% Fe doped TiO₂ and also the lowest response and recovery time of about 52 and 3 s were reported for the same sample.

中文翻译：

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喷涂沉积Fe掺杂TiO2薄膜的湿度传感特性

在目前的工作中，使用喷雾热解技术合成了具有不同体积百分比（vol%）的铁氧体（Fe）掺杂的TiO ₂薄膜。通过 X 射线衍射 (XRD) 数据评估了 Fe 掺杂对微晶尺寸、织构系数、微应变、位错密度等结构特性的影响。XRD 数据显示，样品合成的多晶锐钛矿 TiO ₂相高达 2 vol%，而混合锐钛矿和金红石晶相的样品合成了 4 vol% Fe 掺杂的 TiO ₂. 观察到晶体尺寸随着 Fe 掺杂剂 vol% 的增加而减小，并且其他结构参数也随着 Fe 掺杂剂百分比的变化而变化。在目前的工作中，观察到电阻随着 Fe 掺杂剂 vol% 和样品温度的升高而降低。电阻温度系数和活化能等热性能也显示出与 Fe 掺杂剂 vol% 的强相关性。合成样品的湿度传感特性随 Fe 掺杂剂 vol% 的变化而变化。_{在本文中，据报道，用 2 vol% Fe 掺杂的 TiO 2}合成的样品的最大灵敏度约为 88.7%，并且同一样品的最低响应和恢复时间约为 52 和 3 s。