Femtosecond laser processing is fast becoming a pervasive method for fabricating micro/nanostructures because it can be used to produce micro/nanostructures on myriads of materials with high precision and resolution, requires little control over environmental conditions, and is simple to implement. Here, we review recent developments in the use of femtosecond lasers for the fabrication of micro/nanostructures through ablation and two-photon polymerization (TPP). Moreover, the applications of some of the fabricated micro/nanostructures are also discussed. We highlight the advantages of femtosecond laser processing by explaining the underlying principles of laser ablation and TPP. We also show the use of this method to fabricate new devices with outstanding performance in several application realm, such as sensors, optical devices, microfluidic chips, and soft robotics.

中文翻译：

---

飞秒激光制造的最新进展：从结构到应用

飞秒激光加工正迅速成为制造微/纳米结构的普遍方法，因为它可用于在无数材料上以高精度和分辨率生产微/纳米结构，几乎不需要控制环境条件，并且易于实施。在这里，我们回顾了使用飞秒激光器通过烧蚀和双光子聚合 (TPP) 制造微/纳米结构的最新进展。此外，还讨论了一些制造的微/纳米结构的应用。我们通过解释激光烧蚀和 TPP 的基本原理来突出飞秒激光加工的优势。我们还展示了使用这种方法制造在多个应用领域具有出色性能的新设备，例如传感器、光学设备、