For UV-induced peelable pressure sensitive adhesive (PSA) used in the wafer dicing process, improving the peel performance can effectively increase the process reliability and the yield of subsequent packaging process. In this work, a NCO-containing castor oil-based urethane acrylate oligomer called CO-PUB with dual curable functions (UV-induced polymerization and NCO/OH reaction) was obtained by partially sealing a castor oil-based urethane oligomer with hydroxyethyl acrylate. Fourier transform infrared spectroscopy (FTIR) and nuclear magnetic resonance spectrometer (NMR) results indicated that CO-PUB was successfully prepared. CO-PUB, OH-containing acrylic copolymer, multifunctional acrylate monomer and photo-initiator were used to construct a UV-induced peelable adhesive for silicon wafer dicing. The results showed that NCO groups in CO-PUB underwent the NCO/OH reaction with the acrylic copolymer to obtain a vinyl pendant cross-linked acrylic copolymer. The peel strength of this peelable adhesive before UV irradiation could exceed 20 N/25 mm. After UV irradiation, the unsaturated vinyl bonds contained in it were copolymerized with the multifunctional acrylate monomer to form a fully cross-linked adhesive film and the peel strength could be reduced to below 1 N/25 mm. Compared with UV-induced peelable adhesives prepared by other reported curing agents, the adhesive prepared from CO-PUB reduced UV dose required for curing. The cross-linking degree of cured adhesive film was also increased and the gel content was up to 95%. The residual adhesive after peeling off could be reduced to about 0.32%. In addition, CO-PUB used renewable castor oil as polyol and did not need to add any organic solvent during the preparation process, providing a new idea for the green preparation of UV-induced peelable adhesive with excellent performances.

对于晶圆切割工艺中使用的UV诱导可剥离压敏胶（PSA），提高剥离性能可以有效提高工艺可靠性和后续封装工艺的良率。在这项工作中，一种名为CO的含有 NCO 的蓖麻油基氨基甲酸酯丙烯酸酯低聚物通过用丙烯酸羟乙酯部分密封蓖麻油基氨基甲酸酯低聚物，获得具有双重可固化功能（UV 诱导聚合和 NCO/OH 反应）的 -PUB。傅里叶变换红外光谱 (FTIR) 和核磁共振光谱仪 (NMR) 结果表明 CO-PUB 制备成功。CO-PUB、含OH的丙烯酸共聚物、多功能丙烯酸酯单体和光引发剂被用于构建用于硅片切割的紫外线诱导可剥离粘合剂。结果表明，CO-PUB中的NCO基团与丙烯酸共聚物发生NCO/OH反应，得到乙烯基侧链交联丙烯酸共聚物。这种可剥离粘合剂在紫外线照射前的剥离强度可能超过 20 N/25 mm。紫外线照射后，其中所含的不饱和乙烯基键与多官能丙烯酸酯单体共聚形成完全交联的胶膜，剥离强度可降至1N/25mm以下。与其他报道的固化剂制备的紫外线诱导可剥离粘合剂相比，由CO-PUB制备的粘合剂减少了固化所需的紫外线剂量。固化胶膜的交联度也有所提高，凝胶含量高达95%。剥离后的残留粘合剂可减少至约0.32%。此外，固化胶膜的交联度也有所提高，凝胶含量高达95%。剥离后的残留粘合剂可减少至约0.32%。此外，固化胶膜的交联度也有所提高，凝胶含量高达95%。剥离后的残留粘合剂可减少至约0.32%。此外，CO- PUB以可再生蓖麻油为多元醇，制备过程中无需添加任何有机溶剂，为绿色制备性能优异的紫外线诱导可剥离胶粘剂提供了新思路。