In order to realize that the fuze micro system has both high security and miniaturization characteristics, the spark gap research of Micro-Electro-Mechanical System safety system is carried out. So that to solve the safe and reliable function of the spark gap switch under the low power supply voltage (35 V) of the fuze micro system, the gas gap size and electrode radius are shown to significantly affect the gas breakdown voltage using streamer theory. Based on these results, a spark gap switch with triggering electrodes is designed. The triggering electrode gap is 2 μm and the main electrode gap is 10 μm. A spark gap switch test circuit is designed based on the RLC circuit. Through finite element simulation, it is verified that the gas breakdown voltage increases nonlinearly with increasing gap size. Pre-breakdown spark gap switches were fabricated based on the surface silicon process and tested. The test results show that the conduction voltage values of the triggering electrode and the main electrode are basically consistent with the simulation and calculation results. The breakdown voltage of the main electrode can be greatly reduced by applying a certain voltage to the triggering electrode, realize the reliable function in the micro fuze system.

为实现引信微系统兼具高安全性和小型化的特点，开展了微机电系统安全系统火花隙研究。为了解决引信微系统低电源电压（35 V）下火花隙开关的安全可靠功能，使用流光理论表明气隙大小和电极半径对气体击穿电压有显着影响。基于这些结果，设计了一种带触发电极的火花隙开关。触发电极间隙为2 μ m和主电极间隙为10 μ米。基于RLC电路设计了火花隙开关测试电路。通过有限元仿真，验证了气体击穿电压随着间隙尺寸的增加呈非线性增加。基于表面硅工艺制造并测试了预击穿火花隙开关。测试结果表明，触发电极和主电极的导通电压值与仿真计算结果基本一致。通过对触发电极施加一定的电压，可以大大降低主电极的击穿电压，在微引信系统中实现可靠的功能。