In this article, an overview of the mechanical reliability of silicon microstructures for micro-electro-mechanical systems is given to clarify what we now know and what we still have to know about silicon as a high-performance mechanical material on the microscale. Focusing on the strength and fatigue properties of silicon, attempts to understand the reliability of silicon and to predict the device reliability of silicon-based microstructures are introduced. The effective parameters on the strength and the mechanism of fatigue failure are discussed with examples of measurement data to show the design guidelines for highly reliable silicon microstructures and devices.

中文翻译：

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硅微结构的机械可靠性

在本文中，概述了用于微机电系统的硅微结构的机械可靠性，以阐明我们现在所知道的以及我们仍然需要了解的关于硅作为微尺度上的高性能机械材料的知识。以硅的强度和疲劳特性为重点，尝试了解硅的可靠性并预测硅基微结构的器件可靠性。结合测量数据示例讨论了强度和疲劳失效机制的有效参数，以显示高度可靠的硅微结构和器件的设计指南。