This paper reviews the recent developments of micro-electromechanical system (MEMS) based electrostatically actuated tunable capacitors. MEMS based tunable capacitors (MBTCs) are important building blocks in advanced radio frequency communication systems and portable electronics. This is due to their excellent performance compared to solid state counterpart. Different designs, tuning mechanisms, and performance parameters of MBTCs are discussed, compared, and summarized. Several quantitative comparisons in terms of tuning range, quality factor (Q factor), and electrodes configurations are presented, which provide deep insight into different design studies, assists in selecting designs, and layouts that best suit various applications. We also highlight recent modern applications of tunable capacitors, such as mobile handsets, internet of things, communication sensors, and 5G antennas. Finally, the paper discusses different design approaches and proposes guidelines for performance improvement.

中文翻译：

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RF MEMS 静电驱动可调谐电容器及其应用：综述

本文回顾了基于微机电系统 (MEMS) 的静电驱动可调电容器的最新发展。基于 MEMS 的可调谐电容器 (MBTC) 是高级射频通信系统和便携式电子产品的重要组成部分。这是由于它们与固态对应物相比具有出色的性能。讨论、比较和总结了 MBTC 的不同设计、调整机制和性能参数。在调谐范围、品质因数（问因素）和电极配置，提供对不同设计研究的深入洞察，帮助选择最适合各种应用的设计和布局。我们还重点介绍了可调谐电容器的最新现代应用，例如手机、物联网、通信传感器和 5G 天线。最后，本文讨论了不同的设计方法，并提出了性能改进的指导方针。