An optical waveguide cantilever system with a tip is introduced as the displacement detection system of chip-based atomic force microscopy (AFM) system. A chip-based AFM on optical waveguide is demonstrated with sensitivity of up to 4.0 × 10^–2 nm^–1, which is mainly constructed by a 210 nm thick optical waveguide cantilever with a nano-tip. The nano-tip is a height of 1.2 μm and diameter of 140 nm. This integrated on-chip system provides a displacement range of approximately ±0.4 μm, which makes it possible for the device to be used for AFM imaging and pays the way for further performance improvement.

中文翻译：

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基于芯片的原子力显微镜的集成光波导微悬臂梁系统

介绍了一种带尖端的光波导悬臂梁系统作为基于芯片的原子力显微镜（AFM）系统的位移检测系统。光波导上基于芯片的 AFM 被证明具有高达 4.0 × 10 ^–2 nm ^–1的灵敏度，它主要由具有纳米尖端的 210 nm 厚的光波导悬臂梁构成。纳米尖端的高度为 1.2 μm，直径为 140 nm。这种集成的片上系统提供了大约 ±0.4 μm 的位移范围，这使得该设备可以用于 AFM 成像，并为进一步的性能改进铺平了道路。