In this paper, a silicon rich nitride–lithium niobate on insulator hybrid platform with waveguides and several key components is proposed. The propagation loss of the silicon rich nitride–lithium niobate rib-loaded waveguide (300 × 300 nm²) is 0.86 dB/cm at 1550 nm. Passive devices, including adiabatic power splitters, multimode interferometer-based splitters, asymmetrical Mach–Zehnder interferometers, and Bragg grating filters, are fully designed and characterized. Moreover, we report a Mach–Zehnder modulator with high-speed modulation up to 120 GBaud without digital compensation. The electro-optical response with 1 dB roll-off at 40 GHz is obtained, and the 3-dB modulation bandwidth is predicted to be >100 GHz. Hence, the proposed platform enables high-performance passive and active devices with low loss and high integration density, making it a promising candidate for emerging photonics integrated circuits.

中文翻译：

---

基于绝缘体上富硅氮化物-铌酸锂的高性能紧凑型集成光子学平台

在本文中，提出了一种具有波导和几个关键组件的绝缘体混合平台上的富硅氮化物-铌酸锂。富硅氮化物-铌酸锂肋加载波导（300 × 300 nm ²) 在 1550 nm 处为 0.86 dB/cm。无源器件，包括绝热功率分配器、基于多模干涉仪的分配器、不对称马赫-曾德干涉仪和布拉格光栅滤波器，都经过全面设计和表征。此外，我们报告了一种高速调制高达 120 GBaud 且无需数字补偿的 Mach-Zehnder 调制器。获得了 40 GHz 下 1 dB 滚降的电光响应，预计 3-dB 调制带宽 >100 GHz。因此，所提出的平台能够实现具有低损耗和高集成密度的高性能无源和有源器件，使其成为新兴光子集成电路的有希望的候选者。