Solid state beam steering devices are key elements in low cost, robust, and three-dimensional imaging systems. Here, we present a silicon photonic beam steering device based upon an 8 × 8 grating coupler focal plane array approach fed by a thermo-optic Mach–Zehnder switching tree. In this device, transmission of light from the grating couplers is made through the backside of the chip using topside mirrors allowing for both high-efficiency out-coupling and direct flip-chip integration of drive electronics, providing a path to scale to denser focal plane arrays with large numbers of points in the future. A −13.8 dB fiber-to-fiber transmission was achieved in our preliminary test around 1523 nm for the beam steering chip.

中文翻译：

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具有背面耦合元件的硅光子束控制模块与驱动电子器件实现密集异构集成

固态光束控制装置是低成本、稳健的三维成像系统的关键元件。在这里，我们提出了一种基于 8 × 8 光栅耦合器焦平面阵列方法的硅光子束控制装置，该方法由热光马赫-曾德开关树馈送。在该设备中，来自光栅耦合器的光传输通过芯片背面使用顶面镜实现，从而实现高效外耦合和驱动电子设备的直接倒装芯片集成，提供了扩展至更密集焦平面的路径未来有大量点的数组。在我们的初步测试中，光束控制芯片在 1523 nm 附近实现了 -13.8 dB 的光纤到光纤传输。