Deep understanding of the effects associated with fabrication parameters and their influence on the resulting structures shape is essential for the further development of direct laser writing (DLW). In particular, it is critical for development of reference materials, where structure parameters are precisely fabricated and should be reproduced with use of DLW technology. In this study we investigated the effect of various fabrication and preparation parameters on the structural precision of interest for reference materials. A well-studied photo-curable system, SZ2080 negative photo-resist with 1 wt.% Michler’s ketone (Bis) photo-initiator, was investigated in this work. The correlation between applied laser power, laser velocity, fabrication direction on the deviations in the structure shape were observed by means of white light interferometry microscopy. Moreover, influence of slicing and hatching distances as well as prebake time were studied as function of sample shape. Deviations in the structure form between the theoretically expected and the one detected after DLW fabrication were observed in the range up to 15%. The observed shape discrepancies show the essential importance of fine-tuning the fabrication parameter for reference structure production.

深入了解与制造参数相关的影响及其对所得结构形状的影响对于直接激光写入 (DLW) 的进一步发展至关重要。特别是，对于参考材料的开发至关重要，其中结构参数是精确制造的，并且应该使用 DLW 技术进行复制。在这项研究中，我们调查了各种制造和制备参数对参考材料的结构精度的影响。在这项工作中，研究了一种经过充分研究的光固化系统，SZ2080 负光刻胶和 1 wt.% 米勒酮 (Bis) 光引发剂。应用激光功率与激光速度之间的相关性，通过白光干涉显微镜观察结构形状偏差的制造方向。此外，切片和孵化距离以及预烘烤时间的影响作为样品形状的函数进行了研究。观察到的理论预期与 DLW 制造后检测到的结构形式之间的偏差高达 15%。观察到的形状差异表明微调制造参数对参考结构生产至关重要。