The growing demand for portable and wearable electronics has led to an increased interest in flexible electrodes. The 3D flexible electrode structure is the key to realising the wide application of diversified flexible electronic devices. However, most of the existing flexible electrode manufacturing methods is restricted to fabricating 1D and 2D electrode structures, and it is difficult to simultaneously complete the preparation of the substrate-electrode double-flexible structure in one device. Here, we propose a dual-mode 3D printing system that can realise the one-step integrated manufacturing of flexible 3D electronic devices with nanofiber membrane substrates and liquid metal electrodes. Nanofiber membranes and liquid metal materials have a double flexible structure that increases the compliance performance of the electrode. As a proof of concept, we demonstrated the application of 3D flexible electrodes in electrostatically driven microfluidic valves. The 8 kV driving voltage can make the displacement of the movable membrane more than 40 μm, and realise the on–off control of the microvalve. This technology has the advantages of low cost and integration, demonstrating the promising potential of such printed 3D electrodes to enable 3D flexible electrode devices to be used in microfluidics, software robots and wearable electronic devices.

对便携式和可穿戴电子产品不断增长的需求导致对柔性电极的兴趣增加。3D柔性电极结构是实现多样化柔性电子器件广泛应用的关键。然而，现有的柔性电极制造方法大多局限于制备一维和二维电极结构，难以在一个器件中同时完成基板-电极双柔性结构的制备。在这里，我们提出了一种双模 3D 打印系统，可以实现具有纳米纤维膜基板和液态金属电极的柔性 3D 电子设备的一步集成制造。纳米纤维膜和液态金属材料具有双重柔性结构，增加了电极的柔顺性能。作为概念证明，我们展示了 3D 柔性电极在静电驱动微流体阀中的应用。8kV的驱动电压可使活动膜的位移超过40μ m，实现微阀的开关控制。该技术具有成本低和集成度高等优点，展示了这种印刷 3D 电极的潜力，使 3D 柔性电极设备可用于微流体、软件机器人和可穿戴电子设备。