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A wave-optical model for chromatic confocal sensing using multimode fibre incoherent illumination
Journal of Optics ( IF 2.0 ) Pub Date : 2021-10-19 , DOI: 10.1088/2040-8986/ac2879
Moaaz Rauf Nizami 1, 2 , Daniel Claus 1
Affiliation  

This paper presents a wave-optical model for chromatic confocal signals based on multimode optical fibre data acquisition. It is shown that the emitted light from a multimode fibre can be modelled as a point source grid. The confocal signal can be obtained by incoherent summation of the intensities of the reflected fields in the detector plane. In this manner, this two-dimensional wave-optical model encompasses the temporal incoherence of the light source due to the usage of a broadband light source and the spatial incoherence due to the application of a multimode fibre. In fact, this model enables the modelling of different degrees of coherence. Therefore, to our knowledge, it represents the most thorough modelling tool for chromatic confocal signals. Physical parameters such as the spectral distribution of the polychromatic light source, the lateral distribution of point sources on the grid, and the strength of longitudinal aberrations, and their influences on the chromatic confocal signal have been evaluated in detail. Consideration of all these parameters results in simulated chromatic confocal signals, which almost perfectly match the experimentally recorded chromatic confocal signals. The results obtained will be very useful for the development of a deeper understanding of chromatic confocal sensing, to optimise the setup parameters with regard to a particular application and to reinterpret the results, possibly in combination with artificial intelligence algorithms, in order to increase the measurement precision and to reduce the demands imposed on the manufacturing quality of the optical elements.



中文翻译:

使用多模光纤非相干照明进行彩色共焦传感的波光模型

本文提出了一种基于多模光纤数据采集的彩色共焦信号波光模型。结果表明,多模光纤发出的光可以建模为点源网格。共焦信号可以通过探测器平面中反射场强度的非相干求和获得。以这种方式,这种二维波光模型包含了由于使用宽带光源引起的光源时间不相干性和由于应用多模光纤引起的空间不相干性。事实上,该模型能够对不同程度的连贯性进行建模。因此,据我们所知,它代表了最全面的彩色共焦信号建模工具。多色光源的光谱分布等物理参数,网格上点源的横向分布、纵向像差的强度及其对色度共焦信号的影响已进行了详细评估。考虑所有这些参数会产生模拟的彩色共焦信号,它几乎完全匹配实验记录的彩色共焦信号。获得的结果对于加深对彩色共焦传感的理解非常有用,可以针对特定应用优化设置参数并重新解释结果,可能与人工智能算法相结合,以增加测量精度并降低对光学元件制造质量的要求。纵向像差的强度及其对色度共焦信号的影响已进行了详细评估。考虑所有这些参数会产生模拟的彩色共焦信号,它几乎完全匹配实验记录的彩色共焦信号。获得的结果对于加深对彩色共焦传感的理解非常有用,可以针对特定应用优化设置参数并重新解释结果,可能与人工智能算法相结合,以增加测量精度并降低对光学元件制造质量的要求。纵向像差的强度及其对色度共焦信号的影响已进行了详细评估。考虑所有这些参数会产生模拟的彩色共焦信号,它几乎完全匹配实验记录的彩色共焦信号。获得的结果对于加深对彩色共焦传感的理解非常有用,可以针对特定应用优化设置参数并重新解释结果,可能与人工智能算法相结合,以增加测量精度并降低对光学元件制造质量的要求。考虑所有这些参数会产生模拟的彩色共焦信号,它几乎完全匹配实验记录的彩色共焦信号。获得的结果对于加深对彩色共焦传感的理解非常有用,可以针对特定应用优化设置参数并重新解释结果,可能与人工智能算法相结合,以增加测量精度并降低对光学元件制造质量的要求。考虑所有这些参数会产生模拟的彩色共焦信号,它几乎完全匹配实验记录的彩色共焦信号。获得的结果对于加深对彩色共焦传感的理解非常有用,可以针对特定应用优化设置参数并重新解释结果,可能与人工智能算法相结合,以增加测量精度并降低对光学元件制造质量的要求。

更新日期:2021-10-19
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