We demonstrate feedback control of three-dimensional (3D) parallel focusing for automatic compensation of imperfections in an optical system and long-term stability of parallel focusing. These are realized by a computer-generated hologram (CGH) displayed on a spatial light modulator (SLM), and an iterative calculation based on the observation of the 3D focusing intensities with an image sensor on a programmable linear stage. We demonstrate our parallel laser processing method using 40 parallel beams focused at four different planes, with a maximum uniformity of 0.96, applied to single-shot 3D fabrication in transparent glass.

中文翻译：

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用于飞秒激光加工的具有反馈控制的三维全息平行聚焦

我们展示了三维 (3D) 平行聚焦的反馈控制，用于自动补偿光学系统中的缺陷和平行聚焦的长期稳定性。这些是通过在空间光调制器 (SLM) 上显示的计算机生成的全息图 (CGH) 以及基于在可编程线性平台上使用图像传感器观察 3D 聚焦强度进行的迭代计算来实现的。我们展示了我们的平行激光加工方法，该方法使用聚焦在四个不同平面的 40 束平行光束，最大均匀度为 0.96，应用于透明玻璃中的单次 3D 制造。