The growing interest in microprofile measurements for advanced semiconductor manufacturing and electronic glass screens has stimulated the demand for in situ dynamic white-light interferometry (DWLI). However, it is challenging to perform vibration-insensitive measurements because of the broad-spectrum interference. In this Letter, we report a vertical scanning DWLI using multiwavelength tilt iteration and sliding local least squares. Numerical simulations and comparative experiments were conducted to verify the principle and performance of the proposed method. To the best of our knowledge, this is the first time such a DWLI has been proposed to achieve excellent vibration-resistant performance without using complex photoelectric compensation systems.

中文翻译：

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通过多波长倾斜迭代和滑动局部最小二乘法进行动态白光干涉测量

对先进半导体制造和电子玻璃屏幕的微剖面测量越来越感兴趣，刺激了对原位动态白光干涉测量 (DWLI) 的需求。然而，由于广谱干扰，执行对振动不敏感的测量具有挑战性。在这封信中，我们报告了使用多波长倾斜迭代和滑动局部最小二乘法的垂直扫描 DWLI。数值模拟和对比实验验证了所提出方法的原理和性能。据我们所知，这是第一次提出这样的 DWLI 以在不使用复杂的光电补偿系统的情况下实现出色的抗振性能。