A terahertz metamaterial refractive index/thickness sensor with flexible substrate, exhibiting low-frequency Fano resonance and high-frequency electromagnetically induced transparent (EIT) resonance, is proposed. The physical formation mechanisms of Fano and EIT resonances are investigated by calculating the electromagnetic field. Simulated results demonstrate that the refractive index sensing sensitivity based these two resonances are up to 60 and 100 GHz/RIU, and the thickness sensing sensitivity are up to 1 and 1.7 GHz/μm, respectively. Furthermore, the proposed sensor was fabricated using femtosecond laser etching technology, and its sensing performance was verified by the experimental results that it can distinguish different liquids and detect the polyimide film with different thicknesses less than 180 μm. The remarkable performances make the proposed metamaterial sensor has feasible capability for biological and chemical sensing in terahertz range.

中文翻译：

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柔性基板太赫兹超材料传感器的理论与实验研究


提出了一种具有柔性基板的太赫兹超材料折射率/厚度传感器，表现出低频法诺共振和高频电磁感应透明（EIT）共振。通过计算电磁场来研究 Fano 和 EIT 共振的物理形成机制。模拟结果表明，基于这两种谐振的折射率传感灵敏度分别高达60和100 GHz/RIU，厚度传感灵敏度分别高达1和1.7 GHz/μm。此外，该传感器采用飞秒激光刻蚀技术制作，实验结果验证了其传感性能，可以区分不同的液体并检测小于180μm的不同厚度的聚酰亚胺薄膜。卓越的性能使得所提出的超材料传感器具有在太赫兹范围内进行生物和化学传感的可行能力。