This paper presents an inductive linear displacement sensor with complementary resonant coupling units. The sensor is mainly composed of a stator and two identical movers. The two movers are symmetrically arranged on both sides of the stator, forming a complementary coupling with the stator. The stator contains excitation coils and pickup coils, which generate magnetic field and output induction signals respectively; The movers also contain pickup coils, which are in series with resonance capacitors to generate a secondary magnetic field that reacts on the stator after receiving the excitation magnetic field, rather than outputs induction signals. The structure of this sensor makes the pickup coils on the stator directly receive the magnetic field on the movers in a complementary way, and avoids using leading wires on the movers, which is helpful to improve measurement accuracy and ensure the environmental adaptability of the sensor. The comparison experiments of the sensor prototypes show that the newly designed sensor is insensitive to the change of the gaps between the movers and stator. By improving the sensor prototype, the short-period measurement error is $9 ~\mu \text{m}$ , and the long-period measurement error is not more than $14 ~\mu \text{m}$ within 300mm.

中文翻译：

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具有互补谐振耦合单元的电感式线性位移传感器


本文提出了一种具有互补谐振耦合单元的电感式线性位移传感器。传感器主要由定子和两个相同的动子组成。两个动子对称布置在定子两侧，与定子形成互补耦合。定子内含励磁线圈和拾波线圈，分别产生磁场和输出感应信号；动子还包含拾波线圈，拾波线圈与谐振电容器串联，产生二次磁场，在接收激励磁场后作用在定子上，而不是输出感应信号。该传感器的结构使得定子上的拾波线圈直接互补地接收动子上的磁场，避免了动子上使用引线，有利于提高测量精度并保证传感器的环境适应性。传感器样机的对比实验表明，新设计的传感器对动子和定子之间的间隙变化不敏感。通过改进传感器原型，短周期测量误差为$9 ~\mu \text{m}$，长周期测量误差在300mm内不大于$14 ~\mu \text{m}$。