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Magnetic-field assisted laser ablation of silicon
Journal of the Optical Society of America B ( IF 1.8 ) Pub Date : 2021-11-10 , DOI: 10.1364/josab.433104
Mareike Schäfer 1 , Pavel N. Terekhin 1 , Yiyun Kang 1 , Garik Torosyan 1 , Xavier del Arco Fargas 1 , Steffen Hirtle 1 , Baerbel Rethfeld 1 , Johannes A. L’huillier 1
Affiliation  

The manipulation of the quality of laser ablation of solids can be of crucial importance from fundamental and industrial perspectives. Here we have studied the effect of an external magnetic field on the micromaterial processing of silicon by ultrashort laser pulses. It was found experimentally that such a field directed along the laser beam improves the quality and efficiency of the material removal. Additionally, we observe that the formation of laser-induced periodic surface structures in a multi-pulse regime is affected by the external magnetic field. Our results open a route toward efficient and controllable ultrafast laser micromachining.

中文翻译:

磁场辅助激光烧蚀硅

从基础和工业角度来看,对固体激光烧蚀质量的控制至关重要。在这里,我们研究了外部磁场对超短激光脉冲硅微材料加工的影响。实验发现,这种沿激光束定向的场提高了材料去除的质量和效率。此外,我们观察到在多脉冲状态下激光诱导的周期性表面结构的形成受到外部磁场的影响。我们的结果为高效可控的超快激光微加工开辟了道路。
更新日期:2021-12-02
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