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Metal Micropatterning by Triboelectric Spark Discharge
Advanced Functional Materials ( IF 18.5 ) Pub Date : 2021-11-05 , DOI: 10.1002/adfm.202109265
Chao Wang 1 , Xiangming Li 1 , Liang Wang 1 , Guifang Liu 1 , Bangbang Nie 1 , Yangfan Qiu 1 , Bin Fan 1 , Chao Yan 1 , Xiaoliang Chen 1 , Hongmiao Tian 1 , Chunhui Wang 1 , Jinyou Shao 1
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Metal micropatterns play critical roles in flexible electronics. However, the lack of versatile strategies for micropatterning of diverse metal materials on various thin, flexible or stretchable substrates has limited the rapid development of flexible electronics. Here, a metal micropatterning method by triboelectric spark discharge under atmospheric environment is developed, where a triboelectric nanogenerator (TENG) is employed to precisely and safely control the voltage, current, and frequency of the spark discharges. Micropatterns of metal films like gold, silver, copper, aluminum and platinum are successfully fabricated on substrates of polyimide, polyethylene terephthalate, polyvinyl chloride, polydimethylsiloxane, paper or latex, even on ultrathin substrates (5 μm thick) without damage, where the feature sizes of metal patterns are controllable from 20 μm to 1 mm. Experimental insights into the triboelectric spark discharge behaviors and the pattern feature sizes control are discussed. A straightforward fabrication of metal patterns on the balloon surface or human skin through “handwriting” by a pencil as discharge electrode is realized. Besides metals, extended processibility of conductive materials like carbon nanotubes, graphene, MXene, graphite, carbon fibers, and conductive polymers are also demonstrated. This work proves the possibility of microfabrication by TENG, which is of simplicity and attractiveness for flexible electronics.

中文翻译:

通过摩擦电火花放电进行金属微图案化

金属微图案在柔性电子产品中起着关键作用。然而,缺乏在各种薄、柔性或可拉伸基板上对各种金属材料进行微图案化的通用策略限制了柔性电子产品的快速发展。在这里,开发了一种在大气环境下通过摩擦电火花放电进行金属微图案化的方法,其中采用摩擦纳米发电机 (TENG) 来精确、安全地控制火花放电的电压、电流和频率。在聚酰亚胺、聚对苯二甲酸乙二醇酯、聚氯乙烯、聚二甲基硅氧烷、纸或乳胶等基材上成功制造金、银、铜、铝和铂等金属薄膜的微图案,甚至在超薄基材(5 μm 厚)上也不会损坏,其中金属图案的特征尺寸可控制在 20 μm 到 1 mm 之间。讨论了对摩擦电火花放电行为和图案特征尺寸控制的实验见解。实现了通过用铅笔作为放电电极“手写”在气球表面或人体皮肤上直接制作金属图案。除了金属,还展示了碳纳米管、石墨烯、MXene、石墨、碳纤维和导电聚合物等导电材料的扩展加工性。这项工作证明了 TENG 微加工的可能性,这对于柔性电子产品来说既简单又有吸引力。实现了通过用铅笔作为放电电极“手写”在气球表面或人体皮肤上直接制作金属图案。除了金属,还展示了碳纳米管、石墨烯、MXene、石墨、碳纤维和导电聚合物等导电材料的扩展加工性。这项工作证明了 TENG 微加工的可能性,这对于柔性电子产品来说既简单又有吸引力。实现了通过用铅笔作为放电电极“手写”在气球表面或人体皮肤上直接制作金属图案。除了金属,还展示了碳纳米管、石墨烯、MXene、石墨、碳纤维和导电聚合物等导电材料的扩展加工性。这项工作证明了 TENG 微加工的可能性,这对于柔性电子产品来说既简单又有吸引力。
更新日期:2022-01-04
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