Laser measurement technique has been widely explored and applied in various fields in recent years due to its advantages of high measurement precision and resolution. However, applications in frontier fields such as MEMS motion measurement and robotics control pose have requirement for higher precision and resolution, which promote further studies in improving the performance of this technique. Many advanced techniques have been proposed and applied in the laser measurement system to optimize its performance, and the optimized measurement system has found its way in state-of-the-art applications. In this invited paper, we focus on the latest investigations and new applications of the improved laser measurement methods, especially present recent research works regarding the laser triangulation measurement and the laser heterodyne vibration measurement. At the end, we have discussed further developments and challenges of laser measurement technique.

中文翻译：

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使用先进技术改进激光测量：综述

激光测量技术由于具有测量精度高、分辨率高等优点，近年来在各个领域得到了广泛的探索和应用。然而，MEMS运动测量和机器人控制姿态等前沿领域的应用对精度和分辨率的要求更高，这促进了进一步研究提高该技术的性能。许多先进的技术已被提出并应用于激光测量系统以优化其性能，优化的测量系统已在最先进的应用中找到了自己的道路。在这篇特邀论文中，我们重点介绍了改进的激光测量方法的最新研究和新应用，特别是最近关于激光三角测量和激光外差振动测量的研究工作。最后，我们讨论了激光测量技术的进一步发展和挑战。