High-speed spindles (HSS) are widely employed in the fabrication of ultra-precision microstructures. However, the error motion of an HSS could seriously damage the produced microstructure. Therefore, measurement of radial error motion of HSS is vital. However, the measurement of the dynamic error motion of the spindle requires the utilization of a displacement sensor with a high sampling frequency. The sampling frequency of the applied displacement sensors cannot satisfy the requirement of measuring the dynamic error motion of an HSS. To overcome these limitations, the moiré fringes technology (MFT) is proposed to detect the dynamic radial error motion of an HSS. For that reason, an indicator grating and a ruler grating were used to measure the radial error motion of a spindle at speed of 6000 r/min. Our experimental results indicate that the improved MFT can successfully capture the radial error motion. The fluctuation of measurement results is less than 2% when the spindle speed increases from 600 to 6000 r/min, which corroborates the capability of the improved MFT to measure the dynamic radial error motion of the spindle at a higher speed.

高速主轴 (HSS) 被广泛用于制造超精密微结构。然而，高速钢的错误运动会严重损坏所产生的微观结构。因此，测量高速钢的径向误差运动至关重要。然而，主轴动态误差运动的测量需要使用具有高采样频率的位移传感器。所应用的位移传感器的采样频率不能满足测量高速钢的动态误差运动的要求。为了克服这些限制，提出了莫尔条纹技术（MFT）来检测高速钢的动态径向误差运动。为此，使用指示光栅和直尺光栅测量主轴在 6000 r/min 速度下的径向误差运动。我们的实验结果表明，改进的 MFT 可以成功捕获径向误差运动。当主轴转速从600升至6000 r/min时，测量结果的波动小于2%，证实了改进的MFT在更高转速下测量主轴动态径向误差运动的能力。