This paper presents a review of the radio frequency thin-film lithium niobate (LiNbO₃) based acoustic microsystems. Thanks to their high electromechanical coupling (k ²), low loss, and great frequency scalability, thin-film LiNbO₃ has outperformed state-of-the-art acoustic technologies in the past decade. This paper first reviews the acoustic wave transduction and propagation in thin-film LiNbO₃ and then showcases the emerging acoustic applications. Outlook for further platform development and more functions is offered for future thin-film LiNbO₃ based acoustic microsystems development.

中文翻译：

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基于悬浮铌酸锂薄膜的射频声学微系统：进展与展望

本文综述了基于射频薄膜铌酸锂 (LiNbO ₃ ) 的声学微系统。由于其高机电耦合 ( k ² )、低损耗和良好的频率可扩展性，薄膜 LiNbO ₃在过去十年中的表现优于最先进的声学技术。本文首先回顾了薄膜 LiNbO _{3 中}的声波转换和传播，然后展示了新兴的声学应用。为未来基于薄膜 LiNbO ₃的声学微系统开发提供了进一步平台开发和更多功能的展望。