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Design, analysis, and experimental performance of a novel micro-nozzle based liquid metal direct writing system
Journal of Micromechanics and Microengineering ( IF 2.4 ) Pub Date : 2021-09-09 , DOI: 10.1088/1361-6439/ac1c94
Zhichao Pei , Weibin Rong , Lefeng Wang , Shupeng Wang , Tao Zou , Lining Sun

The use of liquid alloy micro-printing methods for stretchable conductors and sensors has become a hot topic of micromachining research because of its attractive properties. Due to the high surface tension and easy oxidation characteristics of liquid metal, it is difficult to be accurately processed. In this paper, a direct writing method based on micro-nozzles for Galinstan alloy is presented. In comparison with the existing liquid alloy printing methods, the size of metal drops is reduced to 83 $\mu {\text{m}}$ by utilizing its wettability with the substrate and self-made micro-nozzles with the accuracy of micro order in a range from 13 to 87 $\mu {\text{m}}$ inner diameter. This micro direct writing system was used to produce an array of alloy droplets, micro droplets and wires patterns, and a pile of alloy on account of the formation of the gallium-oxide layer which preserves their shapes. The diameter of droplets in an array is less than 83 $\mu {\text{m}}$ and the line width is as small as 83 $\mu {\text{m}}$. This first demonstration of direct writing based on micro-nozzles provides a variety of liquid metal distribution strategies and improves the accuracy of alloy electronics. Also, attempts have been made to produce a vertical pile of droplets, by the shape protection of gallium-oxide skin. This method makes a good compromise between resolution, process simplicity, design flexibility, and fast delivery automaticity.



中文翻译:

一种新型微喷嘴液态金属直写系统的设计、分析和实验性能

将液态合金微印刷方法用于可拉伸导体和传感器,由于其吸引人的特性,已成为微加工研究的热门话题。由于液态金属的表面张力高、易氧化的特性,很难进行精确加工。本文提出了一种基于微喷嘴的伽林斯坦合金直写方法。与现有的液态合金印刷方法相比,$\mu {\text{m}}$利用其与基材的润湿性和自制微喷嘴,微量级精度在13到87之间,将金属液滴的尺寸缩小到83$\mu {\text{m}}$内径。这种微直写系统用于产生一系列合金液滴、微液滴和线状图案,以及由于形成保持其形状的氧化镓层而形成的合金堆。阵列中液滴的直径小于 83 $\mu {\text{m}}$,线宽小至 83 $\mu {\text{m}}$。这种基于微喷嘴的直写的首次演示提供了多种液态金属分布策略,并提高了合金电子器件的准确性。此外,已经尝试通过氧化镓表层的形状保护来产生垂直的液滴堆。这种方法在分辨率、过程简单性、设计灵活性和快速交付自动化之间取得了很好的折衷。

更新日期:2021-09-09
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