Ordered metallic nanostructures, due to their superior electronic and photonic properties, have played a vital role in wide range of applications, such as metamaterials, plasmonic sensing, electrocatalysis, and energy devices. However, traditional fabrication strategies based on bottom-up self-assembly and top-down lithography are either poor in uniformity or time-consuming with low scalability. Here, a robust and cost-effective approach for the fabrication of highly ordered metallic pillars arrays in centimeter scale is presented. This is realized by superplastic nanomolding of metals with highly ordered anodic aluminum oxide templates which are fabricated by the prepatterning of aluminum sheets with bulk metallic glass (BMG) mold, followed by anodizing. The nanopatterning process is rationalized with finite element simulation to avoid the damage of BMG mold. Finally, it is shown that the molded metallic sub-micrometer pillars arrays can be used for the surface-enhanced Raman scattering (SERS) with enhancement factor of ≈10⁶. It is found that the SERS performance is influenced by the specific surface area of the pillars in addition to the near-field intensity. This simple and cost-effective method not only opens new opportunities for rapid prototyping of large-scale ordered metallic nanostructures for various applications but also provides guidance for the quantitative analysis on sub-micrometer scale.

中文翻译：

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用于表面增强拉曼散射的高度有序金属亚微米柱阵列的超塑性纳米成型

有序金属纳米结构由于其优异的电子和光子特性，在超材料、等离子体传感、电催化和能源设备等广泛的应用中发挥了至关重要的作用。然而，基于自下而上自组装和自上而下光刻的传统制造策略要么均匀性差，要么耗时且可扩展性低。在这里，提出了一种用于制造厘米级高度有序的金属柱阵列的稳健且具有成本效益的方法。这是通过金属与高度有序的阳极氧化铝模板的超塑性纳米成型来实现的，该模板是通过用块状金属玻璃 (BMG) 模具对铝板进行预构图，然后进行阳极氧化来制造的。通过有限元模拟使纳米图案化过程合理化，以避免BMG模具的损坏。最后，表明模制金属亚微米柱阵列可用于表面增强拉曼散射（SERS），增强因子约为 10⁶ . 发现除了近场强度外，SERS 性能还受柱的比表面积的影响。这种简单且具有成本效益的方法不仅为用于各种应用的大规模有序金属纳米结构的快速原型制作开辟了新的机会，而且为亚微米尺度的定量分析提供了指导。