To address the resource-competing issue between high sensitivity and wide working range for a stand-alone sensor, development of capacitive sensors with an adjustable gap between two electrodes has been of growing interest. While several approaches have been developed to fabricate tunable capacitive sensors, it remains challenging to achieve, simultaneously, a broad range of tunable sensitivity and working range in a single device. In this work, a 3D capacitive sensor with a seesaw-like shape is designed and fabricated by the controlled compressive buckling assembly, which leverages the mechanically tunable configuration to achieve high-precision force sensing (resolution ~5.22 nN) and unprecedented adjustment range (by ~33 times) of sensitivity. The mechanical tests under different loading conditions demonstrate the stability and reliability of capacitive sensors. Incorporation of an asymmetric seesaw-like structure design in the capacitive sensor allows the acceleration measurement with a tunable sensitivity. These results suggest simple and low-cost routes to high-performance, tunable 3D capacitive sensors, with diverse potential applications in wearable electronics and biomedical devices.

为了解决独立传感器的高灵敏度和宽工作范围之间的资源竞争问题，开发具有两个电极之间可调节间隙的电容式传感器越来越受到关注。虽然已经开发出多种方法来制造可调谐电容传感器，但在单个设备中同时实现广泛的可调谐灵敏度和工作范围仍然具有挑战性。在这项工作中，具有跷跷板形状的 3D 电容式传感器由受控压缩屈曲组件设计和制造，该组件利用机械可调配置实现高精度力感测（分辨率 ~5.22 nN）和前所未有的调节范围（通过~33 倍）的灵敏度。不同负载条件下的机械测试证明了电容式传感器的稳定性和可靠性。电容式传感器中采用非对称跷跷板式结构设计，可实现灵敏度可调的加速度测量。这些结果表明了获得高性能、可调谐 3D 电容式传感器的简单且低成本的途径，在可穿戴电子设备和生物医学设备中具有多种潜在应用。