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Spectroscopic ellipsometry of thin film cyclic olefin copolymer for use in long-wave infrared metasurfaces
Optical Materials Express ( IF 2.8 ) Pub Date : 2021-10-08 , DOI: 10.1364/ome.439317
Jeffrey D’Archangel 1 , Benjamin Cerjan 2 , Lou Deguzman 3 , Mark Griep 4 , Glenn Boreman 3
Affiliation  

Cyclic olefin copolymer (COC) is shown, via infrared variable angle spectroscopic ellipsometry (IR-VASE), to have low absorption along with low dispersion in the long-wave infrared (LWIR) band. The material is demonstrated as the dielectric standoff layer in an LWIR metasurface design consisting of metallic patches and a ground plane, which is fabricated via standard lithographic processes. The resultant metasurface is observed to display strong resonant behavior near 10 µm, without the absorption features typically observed in similar designs using previously studied polymeric materials. COC should be considered for use in future metasurface work where researchers wish to study the physics of LWIR metasurface behavior without the complications caused by absorptive loss in the dielectric layer(s).

中文翻译:

用于长波红外超表面的薄膜环状烯烃共聚物的光谱椭偏仪

环状烯烃共聚物 (COC) 通过红外可变角光谱椭偏仪 (IR-VASE) 显示,在长波红外 (LWIR) 波段具有低吸收和低色散。该材料被证明是 LWIR 超表面设计中的介电隔离层,由金属贴片和接地平面组成,通过标准光刻工艺制造。观察到所得的超表面在 10 µm 附近显示出强烈的共振行为,而没有在使用先前研究的聚合物材料的类似设计中通常观察到的吸收特征。COC 应该被考虑用于未来的超表面工作,研究人员希望研究 LWIR 超表面行为的物理学,而不会出现由介电层中的吸收损失引起的并发症。
更新日期:2021-11-01
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