Flexible force-sensitive sensors are widely used in wearable devices, electronic skins, human-computer interaction and other fields due to their simple manufacturing process, low cost, strong flexibility and great integration potential. A new type of FeSiBY amorphous alloy flexible force-sensitive film and its sensor has been developed in this paper. The film had high elastic modulus, microhardness and higher phase transition temperature. The piezomagnetic effect of this new type of film was significantly better than the Fe₇₈Si₁₃B₉ amorphous alloy film currently used. The single-layer FeSiBY film exhibits a linear change in the micro-stress range of 0–1.2KPa, and the sensitivity was as high as 88.87μH/KPa, which was far better than Fe₇₈Si₁₃B₉ amorphous alloy film’s (the highest was only 0.52μH/KPa). By increasing the number of film layers, the linear range of the piezomagnetic curve of the film can be effectively broadened. The upper limit of the linear range of the piezomagnetic curve of the sensor after 4 layers of films was superimposed reaches 16KPa, and the sensitivity still reached 6.84 μH/KPa. In the area of linear change of the piezomagnetic curve, the loading piezomagnetic curve of FeSiBY film was highly consistent with the unloading piezomagnetic curve, and there was no elastic hysteresis. Meanwhile, the environmental temperature had little effect on the piezomagnetic curve. The piezomagnetic sensor composed of FeSiBY film had the advantages of high sensitivity, wide sensing range, fast response speed, strong anti-interference ability and good repetitiveness, it can be used to test both static compressive stress and dynamic compressive stress and can meet the requirements of subtle stress detection and complex surface test. The sensor was applied to a variety of human physiological activities (such as pulse, pronunciation, joint bending, etc.) with good results. This flexible force-sensitive film sensor has broad application prospects in wearable electronic devices and health monitoring. This article provides a simple, low-cost, and strong anti-interference solution for making flexible film sensors with good force-sensitive properties.

柔性力敏传感器因其制造工艺简单、成本低、柔性强、集成潜力大等优点，被广泛应用于可穿戴设备、电子皮肤、人机交互等领域。本文研制了一种新型FeSiBY非晶合金柔性力敏薄膜及其传感器。该薄膜具有高弹性模量、显微硬度和较高的相变温度。这种新型薄膜的压电效应明显优于目前使用的Fe ₇₈ Si ₁₃ B ₉非晶合金薄膜。单层FeSiBY薄膜在0-1.2KPa微应力范围内呈现线性变化，灵敏度高达88.87μH/KPa，远优于Fe ₇₈硅₁₃ B ₉非晶合金膜的（最高仅为0.52μH/KPa）。通过增加薄膜层数，可以有效拓宽薄膜压电曲线的线性范围。4层薄膜叠加后传感器压磁曲线线性范围上限达到16KPa，灵敏度仍达到6.84 μH/KPa。在压磁曲线线性变化区域，FeSiBY薄膜的加载压磁曲线与卸载压磁曲线高度一致，不存在弹性滞后现象。同时，环境温度对压电曲线的影响很小。FeSiBY薄膜构成的压电传感器具有灵敏度高、传感范围广、响应速度快、抗干扰能力强、重复性好等优点，既可以测试静态压应力，也可以测试动态压应力，可以满足细微应力检测和复杂表面测试的要求。该传感器应用于人体多种生理活动（如脉搏、发音、关节弯曲等），效果良好。这种柔性力敏薄膜传感器在可穿戴电子设备和健康监测方面具有广阔的应用前景。本文为制作具有良好力敏特性的柔性薄膜传感器提供了一种简单、低成本、抗干扰能力强的解决方案。) 效果不错。这种柔性力敏薄膜传感器在可穿戴电子设备和健康监测方面具有广阔的应用前景。本文为制作具有良好力敏特性的柔性薄膜传感器提供了一种简单、低成本、抗干扰能力强的解决方案。) 效果不错。这种柔性力敏薄膜传感器在可穿戴电子设备和健康监测方面具有广阔的应用前景。本文为制作具有良好力敏特性的柔性薄膜传感器提供了一种简单、低成本、抗干扰能力强的解决方案。