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Oxygen-free transport of samples in silane-doped inert gas atmospheres for surface analysis
Journal of Vacuum Science & Technology B ( IF 1.5 ) Pub Date : 2021-09-13 , DOI: 10.1116/6.0001180
René Gustus 1 , Maik Szafarska 1 , Wolfgang Maus-Friedrichs 1
Affiliation  

We report on a new approach to transport samples for surface analysis safely from oxidation over long distances. The transport method is based on silane-doped inert gases, which are used as a transport medium. In this paper, we show that with the help of silane, highly purified inert gas atmospheres with oxygen contents of less than 10−15 mbar can be generated. In addition, we demonstrate that compared to commercially available inert gases, silane-doped inert gas atmospheres can be efficiently used to store and transport samples safely from oxidation. For this, surface sensitive measurements on highly reactive titanium samples, which passed the different stages of samples transport, were performed. The measurements revealed that no pronounced oxidation by the silane-doped atmosphere takes place. However, adsorption of silicon oxide from the atmosphere was observed.

中文翻译:

用于表面分析的硅烷掺杂惰性气体环境中样品的无氧传输

我们报告了一种新方法,可以安全地运输样品进行表面分析,使其免受长距离氧化的影响。传输方法基于硅烷掺杂的惰性气体,用作传输介质。在本文中,我们展示了在硅烷的帮助下,氧含量低于 10 -15 的高纯度惰性气体气氛可以生成mbar。此外,我们证明,与市售惰性气体相比,掺杂硅烷的惰性气体气氛可以有效地用于储存和运输样品,防止氧化。为此,对通过不同样品运输阶段的高活性钛样品进行了表面敏感测量。测量结果表明,硅烷掺杂的气氛没有发生明显的氧化。然而,观察到氧化硅从大气中吸附。
更新日期:2021-09-24
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