We developed a Micro Electro-Mechanical Systems ultrasonic array sensor that is capable of detecting 1 MHz airborne ultrasonic waves for use in devices for inspecting the interior of objects. The sensor is an array of vibrating membranes, each consisting of a metal lower electrode, a platinum upper electrode, and a polymer ferroelectric layer between them. In this study, two kinds of electrode materials, aluminum or gold, were used for the lower electrode to investigate how they affect the characteristics of such high resonant-frequency sensors. The sensor using aluminum showed about four times better sensitivity than that using gold.

中文翻译：

---

1MHz空中超声微阵列传感器的研制

我们开发了一种微型机电系统超声波阵列传感器，它能够检测 1 MHz 的空中超声波，用于检查物体内部的设备。该传感器是一排振动膜，每个振动膜由一个金属下电极、一个铂上电极和它们之间的聚合物铁电层组成。在这项研究中，两种电极材料，铝或金，被用于下电极，以研究它们如何影响这种高谐振频率传感器的特性。使用铝的传感器显示出比使用金的传感器高四倍的灵敏度。