A new high precision ultra-compact decoupled XYZ$\theta$ motion stage based on flexure hinges is designed and analyzed. The stage mainly consists of three components including serial–parallel dual-stage amplifier, Z-shape motion steering mechanism and motion decoupled mechanism. Compared with the existing stages, the proposed high precision motion stage has many advantages such as extremely compact structure, large output decoupling motion and XYZ$\theta$ four axes output displacement. The function of serial–parallel dual-stage amplifier is to amplify the travel range of nano positioning piezo actuator (PZT) by connecting two parallel bridge type mechanism. The Z-shape mechanism can change the direction of motion transmission to make the stage more compact and form movement in XYZ$\theta$ four directions. The decouple mechanism can reduce the implicative movement of different piezo actuators. Then, kinetostatic analysis of this new XYZ$\theta$ stage is conducted to analyze the stage. Finally, the finite-element analysis (FEA) and prototype experiments are implemented to verify the design objectives.

一种新型高精度超紧凑解耦XYZ$\theta$设计并分析了基于挠性铰链的运动平台。该级主要由串并联双级放大器、Z形运动转向机构和运动解耦机构三部分组成。与现有平台相比，所提出的高精度运动平台具有结构极其紧凑、输出解耦运动大和XYZ$\theta$四轴输出位移。串并联双级放大器的作用是通过连接两个并联的桥式机构来放大纳米定位压电执行器（PZT）的行程范围。Z形机构可改变运动传递方向，使载物台更紧凑，形成XYZ运动$\theta$四个方向。解耦机制可以减少不同压电执行器的隐含运动。然后，对这个新的 XYZ 进行动静力学分析$\theta$stage 进行阶段分析。最后，进行有限元分析（FEA）和原型实验以验证设计目标。