The Silicon (Si) contained diamond like carbon (DLC) nanocomposite were prepared by using thermal chemical vapour deposition (CVD) technique by varying the acetylene (C₂H₂) flowrates. The scanning electron microscope (SEM) results showed a smoother surface of nanocomposite at low C₂H₂ flowrates. The atomic force microscope (AFM) reveals the increase of particle size and surface roughness of the composite with respect to the C₂H₂ flowrates. The mechanical properties were evaluated using the nanoindentation and it is observed that the hardness (H) and young’s modulus (E) of the nanocomposite increases with increase of the C₂H₂ flow rate. The minimum and maximum H of the Si-DLC nanocomposite is observed as 10.06 GPa and 14.25 GPa for the C₂H₂ flow rate of 7 sccm and 11 sccm respectively. The internal stress (σ) was computed by using Stoney’s equation and it is noticed that due to the incorporation of Si the residual stress significantly decreased. The minimum and maximum σ are 0.58 GPa and 0.86 GPa for the nanocomposite deposited at C₂H₂ flowrate of 7 sccm and 11 sccm respective. The tribological properties of the nanocomposite were analysed by computing the H/E, H³/E², plasticity index (PI) and elasticity index (EI). The results showed that the Si incorporated nanocomposite (Si-DLC) has an excellent tribological properties.

使用热化学气相沉积 (CVD) 技术通过改变乙炔 (C ₂ H ₂ ) 流速制备含硅 (Si) 类金刚石碳 (DLC) 纳米复合材料。扫描电子显微镜(SEM) 结果显示在低C ₂ H ₂流速下纳米复合材料的表面更光滑。原子力显微镜 (AFM) 揭示了复合材料的粒径和表面粗糙度相对于 C ₂ H ₂流速的增加。使用纳米压痕评估机械性能，观察到纳米复合材料的硬度（H）和杨氏模量（E）随着 C ₂ H _{2 的}增加而增加流速。对于7 sccm 和 11 sccm的 C ₂ H ₂流速，观察到 Si-DLC 纳米复合材料的最小和最大 H 分别为 10.06 GPa 和 14.25 GPa 。内部应力 (σ) 是通过使用 Stoney 方程计算的，注意到由于 Si 的加入，残余应力显着降低。对于分别在 7 sccm 和 11 sccm 的C ₂ H ₂流速下沉积的纳米复合材料，最小和最大 σ 分别为 0.58 GPa 和 0.86 GPa 。通过计算H/E、H ³ /E ²来分析纳米复合材料的摩擦学性能、塑性指数（PI）和弹性指数（EI）。结果表明，掺硅纳米复合材料（Si-DLC）具有优异的摩擦学性能。