Aiming at the problem of low measurement efficiency of conventional single-point chromatic confocal technology, a one-shot chromatic confocal measurement system based on DMD (Digital Micromirror Device) is presented in this paper. This system was set up by applying a polychromatic light source, a color camera, a dispersive lens, and DMD. Firstly, the DMD was used to modulate the polychromatic light source to obtain a point light array. Secondly, a series of focal points were generated by the dispersive lens, and the corresponding relationship between color information and height was established. Lastly, by using an optimized HSI model, the height information of the sample could be obtained, and a 3D profile could be reconstructed accordingly. The experimental data showed that the proposed system can measure and restore the 3D topography of the measured surface by one-shot photography, and the measurement accuracy can reach the micron level.

针对传统单点彩色共焦技术测量效率低的问题，提出了一种基于DMD（Digital Micromirror Device）的一次性彩色共焦测量系统。该系统是通过应用多色光源、彩色相机、色散透镜和 DMD 建立的。首先，利用DMD调制多色光源，得到点光阵列。其次，通过色散透镜产生一系列焦点，建立颜色信息与高度的对应关系。最后，通过使用优化的 HSI 模型，可以获得样本的高度信息，并据此重建 3D 轮廓。