Undesired dynamic characteristics constitute a major source of dynamic measurement errors for contact probes and seriously restrict the improvement of measurement velocity and accuracy. However, the dynamic characteristics of probes are difficult to improve through structural enhancement. A novel dynamic compensation method based on Bayesian inversion was proposed to improve the dynamic performance of probe systems. On the basis of the dynamic model of probe systems, a Bayesian inversion model for dynamic compensation was derived and established. A Bayesian compensation model was developed for a self-developed contact probe. A recursive algorithm was also adopted to obtain the estimated state parameters that reflect the output values of dynamic compensation. The compensation effect was verified by simulation and experimental results. The overshoot of the probe system was reduced from 99.15% to 16.46%, and the settling time was shortened from 2.4825 s to 0.1452 s. The compensation effect of this method was better than that of the classical pole-zero configuration technique. The proposed method can effectively improve the time-domain tracking performance and broaden the frequency-domain measurement bandwidth of the probe system at the same time. The suggested approach is practical, effective, and can be widely used for dynamic system compensation.

不良的动态特性是接触式探头动态测量误差的主要来源，严重制约了测量速度和精度的提高。然而，探针的动态特性很难通过结构增强来改善。提出了一种基于贝叶斯反演的动态补偿方法，以提高探针系统的动态性能。在探针系统动态模型的基础上，推导并建立了动态​​补偿的贝叶斯反演模型。贝叶斯补偿模型是为自行开发的接触探头开发的。还采用递归算法来获得反映动态补偿输出值的估计状态参数。通过仿真和实验结果验证了补偿效果。探针系统的超调量从99.15%降低到16.46%，稳定时间从2.4825 s缩短到0.1452 s。该方法的补偿效果优于经典的零极点配置技术。该方法可以有效提高时域跟踪性能，同时拓宽探测系统的频域测量带宽。该方法实用、有效，可广泛用于动态系统补偿。该方法可以有效提高时域跟踪性能，同时拓宽探测系统的频域测量带宽。该方法实用、有效，可广泛用于动态系统补偿。该方法可以有效提高时域跟踪性能，同时拓宽探测系统的频域测量带宽。该方法实用、有效，可广泛用于动态系统补偿。