We present a low conductive thermal insulation pad named InBallPad (IBP), which we designed for placing of a sample holder of an ultra-high vacuum scanning probe microscope (UHV SPM) associated with Scanning Electron Microscopy (SEM). The microscope will operate at variable temperatures of sample holder in the range of 20 K – 700 K. IBP with diameter of 30 mm, height of 11 mm and mass of 34 g consists of a top and bottom plate made of titanium alloy which are mutually separated by specially designed low heat conductive glass ball supports. The sample holder is mounted onto the top plate whereas the bottom plate serves for mechanical connection to a piezoelectric scanner of SPM at approximately room temperature. IBP is characterized by a high lateral mechanical stiffness of 10⁶ N/m and a low heat flow of 120 mW between the bottom and the top plate at temperatures of 290 K and 25 K, respectively. The use of the pad is not limited to the UHV SPM only, but the component is generally suitable for any devices where the sample holders work in high or ultra-high vacuum and where a wide temperature span from cryogenic to high temperatures is needed.

我们展示了一种名为 InBallPad (IBP) 的低导电隔热垫，我们设计用于放置与扫描电子显微镜 (SEM) 相关的超高真空扫描探针显微镜 (UHV SPM) 的样品架。显微镜将在 20 K – 700 K 范围内的样品架的可变温度下运行。直径为 30 毫米、高度为 11 毫米、质量为 34 克的 IBP 由钛合金制成的顶板和底板组成，它们相互连接由专门设计的低导热玻璃球支架隔开。样品架安装在顶板上，而底板用于在大约室温下机械连接到 SPM 的压电扫描仪。IBP 的特点是具有 10 ⁶的高横向机械刚度 N/m 和底板和顶板之间的低热流为 120 mW，温度分别为 290 K 和 25 K。垫的使用不仅限于 UHV SPM，而且该组件通常适用于样品架在高真空或超高真空中工作以及需要从低温到高温的宽温度范围的任何设备。