This paper presents a resonant differential-pressure (DP) microsensor with temperature (T) and static-pressure (SP) compensations. In this microsensor, three resonators were positioned on and beside the pressure-sensitive diaphragm and the corresponding intrinsic frequencies were translated into differential pressure under the interferences of temperature and static pressure. Finite element simulation was conducted for device modeling, locating the relationship between the intrinsic resonant frequencies of three resonators and values of differential pressure, temperature and static pressure. Microfabrication (e.g., photolithography, deep reactive-ion etching and anodic bonding) was employed to manufacture the microsensor with key fabrication results displayed in this study. Experimental characterizations were conducted, which indicated that the maximum fitting error of the fabricated microsensor was deceased from 2145.7 Pa (before compensation) to 98.2 Pa (after compensation) under a differential-pressure range from 0 kPa to 100 kPa, a temperature range from 10 °C to 60 °C and a static-pressure range from 110 kPa to 200 kPa.

中文翻译：

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具有温度和静压补偿的谐振压差微传感器


本文提出了一种具有温度 (T) 和静压 (SP) 补偿的谐振差压 (DP) 微传感器。在该微传感器中，三个谐振器位于压敏隔膜上和旁边，相应的固有频率在温度和静压的干扰下被转换为压差。对装置建模进行有限元仿真，找出三个谐振器的固有谐振频率与压差、温度和静压值之间的关系。采用微加工（例如光刻、深反应离子蚀刻和阳极键合）来制造微传感器，本研究中展示了关键的制造结果。实验结果表明，在压差0 kPa~100 kPa、温度10℃的条件下，所制作的微传感器的最大拟合误差由补偿前的2145.7 Pa降低到补偿后的98.2 Pa。 °C 至 60 °C，静压范围为 110 kPa 至 200 kPa。