Pressure sensors are one of the most widely used sensors in many process loops. It is said that around two-thirds of the process loop contains at least a pressure sensor, thus making it very important to have a pressure sensor with higher accuracy, sensitivity, etc. The capacitance type pressure sensor is one of the variants of pressure sensors based on the principle of change in capacitance for change in input pressure. The objective of the proposed work is to design a novel pressure sensor with improved sensitivity and accuracy as compared to a conventional diaphragm-based capacitance pressure sensor. The shape and pattern of electrodes used in the capacitance pressure sensor are varied without affecting the overall dimensions. The obtained capacitance is converted to voltage with the help of a signal conditioning circuit, which is further linearized using regression algorithms. From the results obtained it is seen that the proposed sensor has an improvement in sensitivity by a factor of 79 over the conventional diaphragm pressure sensor of similar dimension and composition. The proposed method on implementation in real-life resulted in a root mean square percentage error of 0.46%.

压力传感器是许多过程回路中使用最广泛的传感器之一。据说大约三分之二的过程回路至少包含一个压力传感器，因此拥有一个具有更高精度、灵敏度等的压力传感器非常重要。 电容式压力传感器是压力传感器的变体之一根据输入压力变化的电容变化原理。拟议工作的目标是设计一种新型压力传感器，与传统的基于隔膜的电容压力传感器相比，具有更高的灵敏度和精度。电容式压力传感器中使用的电极的形状和图案在不影响整体尺寸的情况下变化。在信号调节电路的帮助下，获得的电容被转换为电压，使用回归算法进一步线性化。从获得的结果可以看出，与具有相似尺寸和成分的传统隔膜压力传感器相比，所提出的传感器的灵敏度提高了 79 倍。在现实生活中实施的建议方法导致均方根百分比误差为 0.46%。