Complex three-dimensional microstructural patterns arise during deposition of immiscible alloys and their morphologies depend sensitively on alloy composition, deposition rates and substrate temperatures. Using phase field simulations, we construct a microstructure morphology map in a multi-dimensional space of material properties and processing parameters. We consider simultaneous effects from temperature-dependent surface and bulk diffusivities and thermodynamic driving force for phase separation, temperature- and composition-dependent interphase boundary and surface energies, as well as alloy composition, substrate temperature and deposition rate. The microstructural patterns and morphological transition sequences in as-deposited films revealed by the microstructure map are validated using experimental data from sputtered Cu-Mo alloy films as well as from other systems. Such a microstructural map can guide synthesis of three-dimensional compositionally modulated nanostructures via self-organization during deposition of immiscible alloy films.

在不混溶合金的沉积过程中会出现复杂的三维显微结构图案，它们的形态敏感地取决于合金成分、沉积速率和基材温度。使用相场模拟，我们在材料特性和加工参数的多维空间中构建了微观结构形态图。我们考虑了温度相关的表面和体扩散率以及相分离的热力学驱动力、温度和成分相关的界面边界和表面能以及合金成分、基板温度和沉积速率的同时影响。微观结构图显示的沉积膜中的微观结构图案和形态转变序列使用来自溅射 Cu-Mo 合金膜以及其他系统的实验数据进行验证。这种微结构图可以在不混溶合金薄膜的沉积过程中通过自组织指导三维成分调制纳米结构的合成。