In high-reliability applications, the health condition of the MEMS gyroscope needs to be known in real time to ensure that the system does not fail due to the wrong output signal. Because the MEMS gyroscope self-test based on the principle of electrostatic force cannot be performed during the working state. We propose that by monitoring the quadrature error signal of the MEMS gyroscope in real time, an online self-test of the MEMS gyroscope can be realized. The correlation between the gyroscope’s quadrature error amplitude signal and the gyroscope scale factor and bias was theoretically analyzed. Based on the sixteen-sided cobweb-like MEMS gyroscope, the real-time built-in self-test (BIST) method of the MEMS gyroscope based on the quadrature error signal was verified. By artificially setting the control signal of the gyroscope to zero, we imitated several scenarios where the gyroscope malfunctioned. Moreover, a mechanical impact table was used to impact the gyroscope. After a 6000 g shock, the gyroscope scale factor, bias, and quadrature error amplitude changed by −1.02%, −5.76%, and −3.74%, respectively, compared to before the impact. The gyroscope failed after a 10,000 g impact, and the quadrature error amplitude changed −99.82% compared to before the impact. The experimental results show that, when the amplitude of the quadrature error signal seriously deviates from the original value, it can be determined that the gyroscope output signal is invalid.

中文翻译：

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基于正交误差信号的MEMS陀螺仪实时内置自检

在高可靠性应用中，需要实时了解MEMS陀螺仪的健康状况，以确保系统不会因错误的输出信号而出现故障。因为基于静电力原理的MEMS陀螺仪在工作状态下无法进行自检。我们建议通过实时监测MEMS陀螺仪的正交误差信号，实现MEMS陀螺仪的在线自检。从理论上分析了陀螺正交误差幅度信号与陀螺标度因子和偏置之间的相关性。基于十六面蛛网状MEMS陀螺仪，验证了基于正交误差信号的MEMS陀螺仪实时内置自检（BIST）方法。通过人为地将陀螺仪的控制信号设置为零，我们模拟了陀螺仪出现故障的几种情况。此外，机械冲击台用于冲击陀螺仪。在 6000 g 冲击后，陀螺仪比例因子、偏差和正交误差幅度与冲击前相比分别变化了 -1.02%、-5.76% 和 -3.74%。陀螺仪在 10,000 g 撞击后失效，与撞击前相比，正交误差幅度变化了 -99.82%。实验结果表明，当正交误差信号的幅度严重偏离原值时，可以判断陀螺仪输出信号无效。与撞击前相比，分别为 -5.76% 和 -3.74%。陀螺仪在 10,000 g 撞击后失效，与撞击前相比，正交误差幅度变化了 -99.82%。实验结果表明，当正交误差信号的幅度严重偏离原值时，可以判断陀螺仪输出信号无效。与撞击前相比，分别为 -5.76% 和 -3.74%。陀螺仪在 10,000 g 撞击后失效，与撞击前相比，正交误差幅度变化了 -99.82%。实验结果表明，当正交误差信号的幅度严重偏离原值时，可以判断陀螺仪输出信号无效。