The effects of ion irradiation on the surface and the subsurface of synthetic diamonds were characterized by using optical microscopy, atomic force microscopy, Raman spectroscopy, x-ray reflectivity, electron backscatter diffraction, and resistivity measurements. Irradiation experiments with 14 MeV $\mathrm{A}{\mathrm{u}}^{6+}$ ions with fluences up to $2.4\times {10}^{15}$ ions/cm${}^2$ were carried out on synthetic single crystal diamonds, grown either at high pressure or by chemical vapor deposition, and on polycrystalline samples with high boron concentrations. We show that the ion irradiation-induced changes to the surface and subsurface of diamonds are rather complex and, especially in the first few nanometers, more severe than generally considered. We establish a model describing the changes in density, defect concentration, topology, crystallinity, and bonding from the surface down to the first few micrometers of the irradiated diamond.

中文翻译：

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14 MeV Au 离子辐照金刚石的表面和亚表面损伤

通过使用光学显微镜、原子力显微镜、拉曼光谱、X 射线反射率、电子背散射衍射和电阻率测量来表征离子照射对合成钻石表面和亚表面的影响。14 MeV 辐照实验$\mathrm{一种}{\mathrm{你}}^{6+}$ 离子的影响高达 $2.4\times {10}^{15}$ 离子/厘米${}^2$在高压或化学气相沉积下生长的合成单晶金刚石和高硼浓度的多晶样品上进行了研究。我们表明，离子辐射引起的钻石表面和亚表面变化相当复杂，尤其是在最初的几个纳米中，比通常认为的更严重。我们建立了一个模型来描述密度、缺陷浓度、拓扑结构、结晶度和从表面到辐照金刚石最初几微米的结合的变化。