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Analysis of Low-Temperature Plasma by Optical Emission Spectroscopy with Spatial Scanning
Instruments and Experimental Techniques ( IF 0.4 ) Pub Date : 2021-09-14 , DOI: 10.1134/s0020441221040175
R. R. Ismagilov 1 , A. B. Loginov 1 , S. A. Malykhin 1 , V. I. Kleshch 1 , A. N. Obraztsov 1
Affiliation  

An automated device is described that makes it possible to obtain maps of the spatial distribution of the composition and intensity of the components of the optical emission spectra of an activated gaseous medium, as well as to conduct thermometry using machine-learning methods based on a quick comparison of calculated and experimentally recorded radiation spectra. The interpreted Python programming language with a set of specialized libraries was used both to automate the registration of spectra and to analyze them using machine-learning methods. The apparatus was tested based on the example of a methane-hydrogen gas medium activated by a direct current discharge in an apparatus for the plasma–chemical deposition of carbon nanomaterials. The software of the automated apparatus allows one to supplement the measurement procedure by including additional software modules without changing the program code of the main control program.



中文翻译:

用空间扫描的光学发射光谱分析低温等离子体

描述了一种自动化设备,它可以获取活化气态介质的光学发射光谱的成分和强度的空间分布图,以及使用基于快速检测的机器学习方法进行温度测量。计算和实验记录的辐射光谱的比较。带有一组专门库的解释型 Python 编程语言用于自动注册光谱并使用机器学习方法对其进行分析。该设备的测试基于甲烷 - 氢气介质的示例,该介质在用于碳纳米材料的等离子体化学沉积的设备中由直流放电激活。

更新日期:2021-09-15
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