Eigen frequency is one of the most important system responses to be considered while designing a micro-scale piezoelectric cantilever beam. This paper investigates and analyzes the effect of dimension parameters of a micro-scale piezoelectric cantilever beam on its eigen frequency. The beam is assumed to be made of silicon. Structural mechanics based finite element analysis is carried out in the environment of COMSOL Multiphysics software for the study. It is seen that length and thickness have continuous effect on the eigen frequency; whereas, the effect of width is discontinuous.

中文翻译：

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微尺度压电悬臂梁的数值分析：尺寸参数对特征频率的影响

在设计微型压电悬臂梁时，本征频率是要考虑的最重要的系统响应之一。本文研究并分析了微尺度压电悬臂梁尺寸参数对其特征频率的影响。假定梁由硅制成。在 COMSOL Multiphysics 软件环境中进行基于结构力学的有限元分析以进行研究。可以看出，长度和厚度对本征频率有连续的影响；而宽度的影响是不连续的。