Extensive studies on lead halide perovskites have shown that these materials are excellent candidates as gain mediums. Recently, many efforts have been made to incorporate perovskite lasers in integrated optical circuits. Possible solutions would be to utilize standard lithography with an etching/lift-off process or a direct laser etching technique. However, due to the fragile nature of the lead halide perovskites which gives rise to significant material deterioration during the lithography and etching processes, realizing a small-size, low-roughness, and single-mode laser remains a challenge. Here, a lithographic in-mold patterning method realized by nanocrystal concentration control and a multi-step filling-drying process is proposed to demonstrate CsPbBr₃ nanocrystals distributed-Bragg-reflector (DBR) waveguide lasers. This method realizes the patterning of the CsPbBr₃ nanocrystal laser cavity and DBR grating without lift-off and etching processes, and the smallest fabricated structures are obtained in a few hundred nanometers. The single-mode lasing is demonstrated at room temperature with a threshold of 23.5 μJ cm⁻². The smallest full width at half maximum FWHM of the laser output is 0.4 nm. Due to the fabrication process and the DBR laser geometry, the lasers can be fabricated in a compact array, which is important for incorporating perovskite-based lasers in complex optoelectronic circuits.

中文翻译：

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CsPbBr3 纳米晶体分布式布拉格反射器单模激光器的光刻模内图案化

对卤化铅钙钛矿的广泛研究表明，这些材料是作为增益介质的绝佳候选材料。最近，已经做出许多努力将钙钛矿激光器纳入集成光路。可能的解决方案是使用标准光刻和蚀刻/剥离工艺或直接激光蚀刻技术。然而，由于卤化铅钙钛矿的脆弱性会在光刻和蚀刻过程中导致材料显着劣化，实现小尺寸、低粗糙度和单模激光器仍然是一个挑战。在这里，提出了一种通过纳米晶体浓度控制和多步填充-干燥工艺实现的光刻模内图案化方法来演示 CsPbBr ₃纳米晶体分布式布拉格反射器 (DBR) 波导激光器。该方法实现了CsPbBr ₃纳米晶体激光腔和DBR光栅的图案化，无需剥离和蚀刻工艺，并且在几百纳米内获得了最小的制造结构。单模激光在室温下展示，阈值为 23.5 μJ cm ^-2。激光输出的最小半峰全宽 FWHM 为 0.4 nm。由于制造工艺和 DBR 激光器的几何形状，激光器可以制造成紧凑的阵列，这对于将钙钛矿基激光器集成到复杂的光电电路中很重要。