Light scattering of high reflection (HR) coatings caused by interface roughness can be a critical factor for their practical application. A new optimal design method is proposed to reduce the scattering losses of high-reflection coatings by optimizing the interfacial electric field intensity distribution without changing the spectral reflectance of the coatings. Three kinds of high-reflection coatings with different structures are obtained, namely, standard stack high-reflection coatings, standard stacked with additional high refractive index top layer high-reflection coating and standard stack with modified top layers high-reflection coating. The distributions of electric field intensity of three kinds of high-reflection coatings are analyzed and the angle resolved scattering (ARS) of three kinds of high-reflection coatings are simulated under fully uncorrelated interfaces roughness model. Theoretical simulation and experimental results show that the scattering loss of high-reflection coatings can be effectively reduced by optimizing the design of high-reflection coatings to reduce the distribution of electric field intensity.

由界面粗糙度引起的高反射 (HR) 涂层的光散射可能是其实际应用的关键因素。提出了一种新的优化设计方法，在不改变涂层光谱反射率的情况下，通过优化界面电场强度分布来降低高反射涂层的散射损失。得到三种不同结构的高反射涂层，即标准堆叠高反射涂层、标准堆叠附加高折射率顶层高反射涂层和标准堆叠与改性顶层高反射涂层。分析了三种高反射涂层的电场强度分布，并在完全不相关的界面粗糙度模型下模拟了三种高反射涂层的角分辨散射（ARS）。理论模拟和实验结果表明，通过优化高反射涂层的设计，减少电场强度分布，可以有效降低高反射涂层的散射损耗。