Optical Microelectromechanical Systems Technologies for Spectrally Adaptive Sensing and Imaging,Advanced Functional Materials

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Optical Microelectromechanical Systems Technologies for Spectrally Adaptive Sensing and Imaging
Advanced Functional Materials ( IF 18.5 ) Pub Date : 2021-09-12 , DOI: 10.1002/adfm.202103153
Mariusz Martyniuk ₁ , K. K. M. B. Dilusha Silva ₂ , Gino Putrino ₂ , Hemendra Kala ₂ , Dhirendra Kumar Tripathi ₂ , Gurpreet Singh Gill ₂ , Lorenzo Faraone ₁

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Evolving from past black-and-white images, through present red-green-blue spectral colors, future remote imaging systems promise spectroscopic functionalities extending well beyond the visible wavelengths. This allows real-time spectral information to be gathered from multiple wavelength bands that is applicable to numerous remote sensing spectroscopy/imaging applications and aids target recognition. This paper reviews the wavelength tunable microelectromechanical systems (MEMS) optical filter technologies developed for the important infrared and the emerging terahertz wavelength bands of the electromagnetic spectrum with the fabrication effort being enabled by the Western Australian Node of the Australian National Fabrication Facility. A low size, weight and power (SWaP) platform solution is demonstrated delivering mechanically robust, field-portable, spectroscopic, chem/bio sensing suitable for deployment in remote sensing and imaging applications.

中文翻译：

用于光谱自适应传感和成像的光学微机电系统技术

从过去的黑白图像发展到现在的红绿蓝光谱颜色，未来的远程成像系统有望实现远远超出可见波长的光谱功能。这允许从适用于众多遥感光谱/成像应用的多个波段收集实时光谱信息，并有助于目标识别。本文回顾了波长可调谐微机电系统 (MEMS) 滤光片技术，该技术是为重要的红外线和新兴的太赫兹波段的电磁光谱开发的，其制造工作由澳大利亚国家制造设施的西澳大利亚节点启用。展示了一种低尺寸、重量和功率 (SWaP) 平台解决方案，可提供机械坚固、适合部署在遥感和成像应用中的现场便携式、光谱、化学/生物传感。

更新日期：2021-09-12

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