The calibration of areal surface topography measuring instruments is of high relevance to estimate the measurement uncertainty and to guarantee the traceability of the measurement results. Calibration structures for optical measuring instruments must be sufficiently small to determine the limits of the instruments.

Besides other methods, micro-milling is a suitable process for manufacturing areal material measures. For the manufacturing by micro-milling with ball end mills, the tool radius (effective cutter radius) is the corresponding limiting factor: if the tool radius is too large to penetrate the concave profile details without removing the surrounding material, deviations from the target geometry will occur. These deviations can be detected and excluded before experimental manufacturing with the aid of a kinematic simulation.

In this study, a kinematic simulation model for the prediction of the dimensional accuracy of micro-milled areal material measures is developed and validated. Subsequently, a radius study is conducted to determine how the tool radius r of the tool influences the dimensional accuracy of an areal crossed sinusoidal (ACS) geometry according to ISO 25178-70 [1] with a defined amplitude d and period length p. The resulting theoretical surface texture parameters are evaluated and compared to the target values. It was shown that the surface texture parameters deviate from the nominal values depending on the effective cutter radius used. Based on the results of the study, it can be determined with which effective tool radius the measurands Sa and Sq of the material measures are best met. The ideal effective radius for the application considered is between 50 and 75 μm.

面状表面形貌测量仪器的校准对于估计测量不确定度和保证测量结果的可追溯性具有重要意义。光学测量仪器的校准结构必须足够小，以确定仪器的极限。

除其他方法外，微铣削是制造区域材料测量的合适工艺。对于使用球头立铣刀进行微铣削制造，刀具半径（有效刀具半径）是相应的限制因素：如果刀具半径太大而无法在不去除周围材料的情况下穿透凹形轮廓细节，则与目标几何形状的偏差会发生。借助运动学模拟，可以在实验制造之前检测并排除这些偏差。

在这项研究中，开发并验证了用于预测微铣削面材料测量尺寸精度的运动学仿真模型。随后，根据 ISO 25178-70 [1]进行半径研究，以确定刀具的刀具半径r如何影响具有定义的振幅d和周期长度p的面交叉正弦 (ACS) 几何形状的尺寸精度。评估所得的理论表面纹理参数并将其与目标值进行比较。结果表明，根据所使用的有效刀具半径，表面纹理参数会偏离标称值。根据研究结果，可以确定被测量Sa使用哪个有效刀具半径和Sq的物质措施最好满足。所考虑应用的理想有效半径介于 50 和 75 微米之间。